Octavo
Illuminator
It could begin with the development of cyborgs. As our knowledge of brain function advances the possibility of direct interface and replacement of damaged neurological parts with cybernetic parts could continue until there is nothing left of the original biological brain. Such a machine/person could plug into any number of body types including a humanoid that would look much like a bio-human. One question is, would the resulting machine be considered a legal person?
I read the OP as referring specifically to robots though. In my mind, cybernetic enhancement is human wearable or implantable machines. In other words, human-controlled or piloted machines. A robot is something different. It does not have any human input. It may contain artificial biological material however.
IOW - my take on the OP was more, will we ever have androids? (think: Bishop from Alien)
Perhaps I'm being too pedantic though